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Finland·Buyer: VTT Technical Research Centre of Finland

Ion beam trimmer

Awarded·3 Sep 2026·EUR 1,256,300

Ion beam trimmer The object of the tender was 200 mm wafer particle beam trimming tool for VTT Micronova cleanroom semiconductor front end processing. The particle beam may be an ion beam, or a gas cluster beam, with a full width at half maximum within 3-15 mm. The tool had to be compatible with installation in an ISO 4 classified cleanroom. The object of the tender process was described in more detail in the invitation to tender documents.,

Published

03.09.2026

Awarded

03.09.2026

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Wafer metrology

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