Germany·Buyer: Walther-Meissner-Institut der Bayerischen Akademie der Wissenschaften

Plasma Ashing System

Open for bids·25 Oct 2026

The Walther-Meissner-Institute (WMI) will acquire a plasma ashing system for the fabrication of integrated quantum circuits. The system should be capable of ashing and descumming of photo resist on 200 mm wafers with high uniformity. The plasma ashing system shall be turnkey ready, i.e., fully equipped with all necessary components, control electronics, and software. The system shall be ready for automated operation, i.e., the hardware components have to be equipped with appropriate interfaces for computer connection.

Published

25.10.2026

Open for bids

25.10.2026

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