Otnox
NLNetherlands·Buyer: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO

Metrology SEM+FIB system

Awarded·3 Nov 2026·EUR 825,000

The main purpose of this FIB/SEM equipment is to perform material milling (cutting), 3D characterization, and cross section analysis of epitaxially grown InP, InGaAs, InAlGaAs and InGaAsP layers on InP substrates. The structures may also contain polymer-based planarization layers, SiOx or SiNx dielectric layers and TiPtAu or NiGeAu metal layers.

Deadline

07.09.2026

Published

03.11.2026

Awarded

03.11.2026

Otnox

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