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Germania·Autoritate contractantă: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V.

Process Monitoring Tool

Anulată·26 aug 2026

Upgrade of the existing process monitoring system mesc21-11 (Nanofocus topography measurement system serial number 700259) located at Fraunhofer IPMS CNT An der Bartlake 5. Upgrade cosists of an automatic handling system for wafers in a seperately enclosed environment. The system is capable of handling wafers from a SEMI 300 mm FOUP to the existing measurement tool. The system is also able to introduce 200 mm Wafers into a suitable adapter enabling processing on standard 300 mm tools and handle the 200 mm wafers in adapter into a SEMI standard 300 mm FOUP.

Publicat

26.08.2026

Închisă

26.08.2026

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