🇩🇰Danija·Perkančioji organizacija: Danmarks Tekniske Universitet - DTU

Delivery and installation of a High ion density etcher for lithium niobate on insulator - LiNb03 (LN)

Uždaryta·11 rugs. 2026

DTU Nanolab wishes to acquire a high ion density source reactive ion etcher for etching lithium niobate on insulator 150 mm wafer processing. Delivery is expected no later than Q4 2027. We are looking for a highly versatile instrument providing stable etch recipes, capable of etching at both nanometer scale and micrometer scale with precise control of etching depth, typically a few hundreds of nm. The instrument must have state-of-the-art performance in terms of profile control, uniformity, selectivity, and in particu-lar etching sidewall smoothness to achieve low waveguide loss. The Instrument will be installed in the DTU Nanolab cleanroom - a university facility providing a comprehensive suite of micro- and nanofabrication tools. It serves a diverse community of over 200 active users, ranging from novice students to experienced researchers, as well a high percentage of commercial clients. At DTU Nanolab there are several research groups and companies working on developing and running small scale production of optical devises on the tools. Therefor the capability of etching smooth optical waveguide, gratings and other low-roughness optical devises are of high importance to us.

Paskelbta

11.09.2026

Priima pasiūlymus

11.09.2026

Terminas

15.10.2026

The procurement of the Supply, Installation and Commissioning of a Focused Ion Beam Scanning Electron Microscope (FIB-SEM) with Gallium Ion Source

Priima pasiūlymus·Oct 15

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Intelligent styresystem til global mobility compliance

Sutartis suteikta·Oct 14

DKK 878,723

Delivery and installation of a ICP Reactive ion etcher for silicon dielctrics

Priima pasiūlymus·Oct 12

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Integrated Tunable Laser Platform with Wavelength Stabilisation for photonic integrated circuit

Sutartis suteikta·Oct 12

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Værktøjsudbud (1)

Sutartis suteikta·Oct 12

DKK 28,800,000

Indsamling og behandling af affald

Priima pasiūlymus·Oct 8

DKK 25,200,000

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